Photo-initiated deposition and etching of materials relevant to semiconductor devices

Photo-initiated deposition and etching of materials relevant to semiconductor devices

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a#39;Spectra- Physics data sheet. b Peak power. 800i i i i i | 1 ra€” i a€”. References 47 667 217 678 b 480 d e 481 b, 482 S b, 483 667 667 678 670 670 670 417 484 654 Pulse duration 1ms ao 00 00 12 ns 10-20 ns 15 ns 27 ps 80 ps alt;100ps 85 ps anbsp;...


Title:Photo-initiated deposition and etching of materials relevant to semiconductor devices
Author: J. Haigh, M. R. Aylett
Publisher: - 1988
ISBN-13:

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